MONOMER FOR A HARDMASK COMPOSITION, HARDMASK COMPOSITION COMPRISING THE MONOMER, AND METHOD FOR FORMING A PATTERN USING THE HARDMASK COMPOSITION

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United States of America Patent

SERIAL NO

15668159

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Abstract

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Disclosed are a monomer for a hardmask composition represented by the following Chemical Formula 1, a hardmask composition including the monomer, and a method of forming a pattern using the same.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG SDI CO LTDGYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEON, Hwan-Sung Suwon-si, KR 44 240
CHO, Youn-Jin Suwon-si, KR 22 117
CHOI, Yoo-Jeong Suwon-si, KR 16 167
KIM, Yun-Jun Suwon-si, KR 17 121
KWON, Hyo-Young Suwon-si, KR 15 65
LEE, Chung-Heon Suwon-si, KR 17 147
YOON, Yong-Woon Suwon-si, KR 14 88

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