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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT AG	RUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Feldmann, Heiko	Aalen, DE	77	442
Gruner, Toralf	Aalen-Hofen, DE	173	1727
Kamenov, Vladimir	Essingen, DE	30	118
Kraehmer, Daniel	Essingen, DE	59	660
Pazidis, Alexandra	Essingen-Lauterburg, DE	29	463
Six, Stephan	Aalen, DE	16	79
Thome, Bruno	Aalen, DE	6	36
Weissenrieder, Karl-Stefan	Elchingen, DE	10	68
Zirkel, Achim	Muenchen, DE	8	10

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	May 9, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	May 9, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2017/0322,343

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

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