Piezoelectric micromachined ultrasonic transducer (PMUT)
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United States of America Patent
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May 19, 2020
Grant Date -
Nov 9, 2017
app pub date -
Jul 8, 2016
filing date -
May 4, 2016
priority date (Note) -
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Abstract
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. An interior support structure is disposed within the cavity and connected to the substrate and the membrane.
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