SUBSTRATE PROCESSING TOOL

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United States of America Patent

SERIAL NO

15528088

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate processing tool is prevented from falling out of a tool holder. This substrate processing tool is a tool for attachment to a substrate processing apparatus. The substrate processing tool includes a tool main body, a blade edge portion, and an engaging portion. A holding portion that is to be held by the chuck portion of the substrate processing apparatus is formed in at least a portion of the tool main body. The blade edge portion is formed on one end side of the tool main body. The engaging portion is formed on the other end side of the tool main body, and protrudes farther than the surface of the tool main body.

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Patent Owner(s)

Patent OwnerAddress
MITSUBOSHI DIAMOND INDUSTRIAL CO LTDSETTSU OSAKA 566-0034

International Classification(s)

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  • 2015 Application Filing Year
  • B26D Class
  • 414 Applications Filed
  • 295 Patents Issued To-Date
  • 71.26 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20152016201720182019202020210255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HIRAGURI, Yosuke Settsu city, Osaka, JP 1 0
OGASAWARA, Noriyuki Settsu city, Osaka, JP 16 64
SATO, Shinichi Settsu city, Osaka, JP 434 5912

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Patent Citation Ranking

  • 0 Citation Count
  • B26D Class
  • 0 % this patent is cited more than
  • 8 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges22428218321101 - 1011 - 2021 - 3051 - 6071 - 8081 - 90020406080100120140160180200220240260280300

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