SUBSTRATE PROCESSING TOOL
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
N/A
app pub date -
Nov 26, 2015
filing date -
Nov 27, 2014
priority date (Note) -
Published
status (Latency Note)
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Importance

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Abstract
A substrate processing tool is prevented from falling out of a tool holder. This substrate processing tool is a tool for attachment to a substrate processing apparatus. The substrate processing tool includes a tool main body, a blade edge portion, and an engaging portion. A holding portion that is to be held by the chuck portion of the substrate processing apparatus is formed in at least a portion of the tool main body. The blade edge portion is formed on one end side of the tool main body. The engaging portion is formed on the other end side of the tool main body, and protrudes farther than the surface of the tool main body.
First Claim
all claims..Other Claims data not available
Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
MITSUBOSHI DIAMOND INDUSTRIAL CO LTD | SETTSU OSAKA 566-0034 |
International Classification(s)

- 2015 Application Filing Year
- B26D Class
- 414 Applications Filed
- 295 Patents Issued To-Date
- 71.26 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
HIRAGURI, Yosuke | Settsu city, Osaka, JP | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
OGASAWARA, Noriyuki | Settsu city, Osaka, JP | 16 | 64 |
# of filed Patents : 16 Total Citations : 64 | |||
SATO, Shinichi | Settsu city, Osaka, JP | 434 | 5912 |
# of filed Patents : 434 Total Citations : 5912 |
Cited Art Landscape
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Patent Citation Ranking
- 0 Citation Count
- B26D Class
- 0 % this patent is cited more than
- 8 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | May 9, 2025 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 9, 2029 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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