SUSCEPTOR
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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N/A
Issued Date -
N/A
app pub date -
Jul 18, 2017
filing date -
Jun 2, 2014
priority date (Note) -
Published
status (Latency Note)
Importance
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US Family Size
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Non-US Coverage
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Abstract
A susceptor is provided. The susceptor comprises: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring, wherein the outer ring comprises multiple sub-elements separated from each other and detachably connected to the base part; wherein the inner ring and the outer ring separate the holders from one another, and the inner ring comprises multiple first extensions each protruding outwardly toward the outer ring, and each sub-element comprises a second extension extending inwardly toward the inner ring.
First Claim
Other Claims data not available
Family
| Country | kind | publication No. | Filing Date |
|---|---|---|---|
| US | B2 | US9396983 | Jun 02, 2014 |
| TW | B | TWI659496 | Oct 16, 2014 |
| CN | B | CN105280534 | Nov 05, 2014 |
| US | B2 | US9738974 | Jul 02, 2015 |
International Classification(s)
- 2017 Application Filing Year
- C23C Class
- 3339 Applications Filed
- 2148 Patents Issued To-Date
- 64.34 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- 8 Age