Extreme UV light generation device and target recovery apparatus
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United States of America Patent
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Jul 17, 2018
Grant Date -
Oct 26, 2017
app pub date -
Jul 10, 2017
filing date -
Feb 26, 2015
priority date (Note) -
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Abstract
An EUV light generation device generates EUV light stably. The EUV light generation device may include a chamber in which extreme ultraviolet light is generated when a target is irradiated with laser light in a predetermined region inside the chamber, a target supply device configured to output the target to the predetermined region in the chamber to thereby supply the target to the predetermined region, and a target recovery apparatus configured to recover the target output from the target supply device and not irradiated with the laser light. The target recovery apparatus may include a receiver disposed to be inclined with respect to a trajectory of the target output from the target supply device, the receiver being configured to receive the target by allowing the target not irradiated with the laser light to collide with the receiver, and an excitation device configured to vibrate the receiver.
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