Method of manufacturing a pressure sensor
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United States of America Patent
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Dec 22, 2020
Grant Date -
Oct 26, 2017
app pub date -
Apr 5, 2017
filing date -
Apr 20, 2016
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Abstract
A method of manufacturing a pressure sensor is shown, wherein the pressure sensor comprises a port element with a sealing structure and a membrane. Four strain gages will be attached to the membrane. The gages are used in a Wheatstone bridge to sense the fluid pressure. A first finite element action determines a first contour around the membrane central axis with equal compressive strain and a second contour around the membrane central axis with equal tensile strain wherein when fluid pressure is applied to the membrane strain on the first contour is opposite strain on the second contour. A second finite element action determines the four positions of the strain gages on the first and second contour such that the difference between the highest error signal and the lowest error signal at the output of the Wheatstone bridge is minimal under influence of parasitic forces.
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