Nozzle and work polishing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10636685
APP PUB NO 20170301573A1
SERIAL NO

15470441

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Abstract

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A nozzle according to the invention includes a liquid flow passage through which a liquid flows, a gas flow passage through which a gas flows, the gas flow passage communicating with the liquid flow passage and feeding the gas to the liquid flow passage, and a plasma generating mechanism for generating plasma in the gas fed from the gas flow passage to the liquid flow passage, in which the plasma generating mechanism includes a first electrode provided so as to be exposed to an inside of the liquid flow passage, a second electrode provided so as not to be exposed to the inside of the liquid flow passage and so as to be exposed to an inside of the gas flow passage, and a power source for applying a predetermined voltage across the first electrode and the second electrode, and in which the liquid with which the gas including the generated plasma is mixed as bubbles having a predetermined diameter is spouted.

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Patent Owner(s)

Patent OwnerAddress
FUJIKOSHI MACHINERY CORP1650 KIYONO MATSUSHIRO-MACHI NAGANO-SHI NAGANO 381-1233

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Yoshio Nagano, JP 134 1806
Shibuya, Kazutaka Nagano, JP 27 122

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