METHOD OF ACQUIRING TSOM IMAGE AND METHOD OF EXAMINING SEMICONDUCTOR DEVICE
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United States of America Patent
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app pub date -
Dec 27, 2016
filing date -
Apr 19, 2016
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Abstract
Methods of acquiring a through-focus scanning optical microscopy (TSOM) image and inspecting a semiconductor device are provided. A method of acquiring the TSOM image includes: acquiring a plurality of actual images of different focal positions and out-of-focus degrees (distances) of the actual images with respect to an inspection object through an optical tool; acquiring a plurality of virtual images having different focal positions from the actual images and the focal positions thereof, based on the actual images and the out-of-focus degrees of the actual images; and acquiring a TSOM image of the inspection object by using the actual images and the virtual images. According to a method of acquiring the TSOM image and the method of inspecting the semiconductor device, it is possible to acquire high-precision TSOM images of the object with less effort and time and to inspect the semiconductor device efficiently and at low cost.
First Claim
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Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
KR | B1 | KR101936628 | Dec 12, 2016 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PATENT SPECIFICATION | TSOM 이미지 획득 방법 및 반도체 장치 검사 방법 | Jan 10, 2019 | |||
JP | B2 | JP6328222 | Dec 28, 2016 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PUBLISHED GRANTED PATENT (SECOND LEVEL) | TSOMイメージ獲得方法及び半導体装置検査方法 | May 23, 2018 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION | 27 GAETBEOL-RO YEONSU-GU INCHEON 21999 |
International Classification(s)

- 2016 Application Filing Year
- G06T Class
- 11416 Applications Filed
- 7909 Patents Issued To-Date
- 69.28 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Cho, Joong-Hwee | Incheon, KR | 1 | 4 |
# of filed Patents : 1 Total Citations : 4 | |||
Choi, Hee-Chul | Incheon, KR | 4 | 6 |
# of filed Patents : 4 Total Citations : 6 | |||
Kang, Jun-Hee | Incheon, KR | 1 | 4 |
# of filed Patents : 1 Total Citations : 4 | |||
Kim, Hyeong-Bok | Incheon, KR | 1 | 4 |
# of filed Patents : 1 Total Citations : 4 | |||
Shin, Seung-II | Incheon, KR | 1 | 4 |
# of filed Patents : 1 Total Citations : 4 |
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Patent Citation Ranking
- 4 Citation Count
- G06T Class
- 16.26 % this patent is cited more than
- 8 Age
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