METHOD OF ACQUIRING TSOM IMAGE AND METHOD OF EXAMINING SEMICONDUCTOR DEVICE

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United States of America Patent

SERIAL NO

15391502

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Abstract

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Methods of acquiring a through-focus scanning optical microscopy (TSOM) image and inspecting a semiconductor device are provided. A method of acquiring the TSOM image includes: acquiring a plurality of actual images of different focal positions and out-of-focus degrees (distances) of the actual images with respect to an inspection object through an optical tool; acquiring a plurality of virtual images having different focal positions from the actual images and the focal positions thereof, based on the actual images and the out-of-focus degrees of the actual images; and acquiring a TSOM image of the inspection object by using the actual images and the virtual images. According to a method of acquiring the TSOM image and the method of inspecting the semiconductor device, it is possible to acquire high-precision TSOM images of the object with less effort and time and to inspect the semiconductor device efficiently and at low cost.

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Patent Owner(s)

Patent OwnerAddress
INCHEON UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION27 GAETBEOL-RO YEONSU-GU INCHEON 21999

International Classification(s)

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  • 2016 Application Filing Year
  • G06T Class
  • 11416 Applications Filed
  • 7909 Patents Issued To-Date
  • 69.28 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20162017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Joong-Hwee Incheon, KR 1 4
Choi, Hee-Chul Incheon, KR 4 6
Kang, Jun-Hee Incheon, KR 1 4
Kim, Hyeong-Bok Incheon, KR 1 4
Shin, Seung-II Incheon, KR 1 4

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  • 4 Citation Count
  • G06T Class
  • 16.26 % this patent is cited more than
  • 8 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1485831123912924101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 80050100150200250300350400450500550600650

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