CARBON NANOTUBE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

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United States of America Patent

SERIAL NO

15512299

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Abstract

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The present disclosure pertains to the field of carbon nanotube technologies, and provides a carbon nanotube semiconductor device and a manufacturing method thereof. The manufacturing method of a carbon nanotube semiconductor device provided in the present disclosure comprises: forming a carbon nanotube layer with a carbon nanotube solution; and treating the carbon nanotube layer with an acidic solution. The carbon nanotube semiconductor device manufactured by the method of the present disclosure has good performance uniformity.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTDNO 10 JIUXIANQIAO RD CHAOYANG DISTRICT BEIJING 100015
PEKING UNIVERSITY100871 NO 5 THE SUMMER PALACE ROAD BEIJING HAIDIAN DISTRICT BEIJING CITY BEIJING CITY 100871

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hui, Guanbao Beijing, CN 35 141
Liang, Xuelei Beijing, CN 9 47
Peng, Lianmao Beijing, CN 7 44
Tian, Boyuan Beijing, CN 4 13
Xia, Jiye Beijing, CN 7 14
Yan, Qiuping Beijing, CN 3 12
Zhang, Fangzhen Beijing, CN 50 105
Zhao, Haiyan Beijing, CN 20 58

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