Device and method for calibrating a film chamber for leak detection

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United States of America Patent

PATENT NO 10670489
APP PUB NO 20170292894A1
SERIAL NO

15513715

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Abstract

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A method for calibrating a test chamber, which encloses an interior volume (20), is designed as a film chamber (12) comprising at least one flexible wall region (14, 16), and is connected in a gas-conducting way to a pressure sensor (30), to a vacuum pump (26), and via a calibration valve (34) to a calibration chamber (36) enclosing a calibration volume (37), comprising the following steps: evacuating the film chamber (12); measuring the pressure difference inside of the film chamber (12); after the evacuation has been completed, connecting the calibration volume (37) in a gas-conducting manner to the interior volume (20) of the film chamber (12) while measuring the pressure change, wherein the pressure in the calibration chamber (36) is greater than the pressure in the film chamber (12) before the connection to the film chamber (12). A corresponding device is likewise disclosed.

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Patent Owner(s)

Patent OwnerAddress
INFICON GMBHBONNER STRASSE 498 KÖLN 50968

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Decker, Silvio Cologne, DE 30 80

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