Pressure sensors with tensioned membranes
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United States of America Patent
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Aug 11, 2020
Grant Date -
Oct 12, 2017
app pub date -
Apr 11, 2017
filing date -
Apr 11, 2016
priority date (Note) -
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Abstract
Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.
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