INTEGRATED HALL EFFECT SENSORS WITH VOLTAGE CONTROLLABLE SENSITIVITY
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Mar 28, 2017
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Mar 29, 2016
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Abstract
An integrated Hall effect sensor is disclosed. The integrated Hall effect sensor has high tunable sensitivity by varying the thickness of the Hall plate. The Hall effect sensor is integrated onto a crystalline-on-insulator substrate, such as silicon-on-insulator (SOI) substrate. The Hall plate is part of the surface substrate of the SOI substrate. A sensor well is disposed in the bulk substrate of the SOI substrate. By applying an appropriate well bias voltage, the thickness of the Hall plate can be tuned from below the surface substrate to achieve the desired sensitivity. A gate may also be provided on the surface substrate. Biasing the gate with an appropriate gate bias voltage can further enhance thickness tunability of the Hall plate from above to achieve the desired sensitivity.
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