Cholate photoacid generators and photoresists comprising same

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United States of America Patent

PATENT NO 10809616
APP PUB NO 20170285470A1
SERIAL NO

15614376

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Abstract

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New photoacid generator compounds (“PAGs”) are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aqad, Emad Marlborough, US 70 229
Li, Mingqi Marlborough, US 105 434
Mattia, Joseph Marlborough, US 8 32
Xu, Cheng-Bai Southboro, US 81 642

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