Scanning probe microscope and probe contact detection method
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United States of America Patent
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Dec 11, 2018
Grant Date -
Oct 5, 2017
app pub date -
Mar 24, 2017
filing date -
Mar 29, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.
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