Pentachlorodisilane production method and pentachlorodisilane produced by same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10294110
APP PUB NO 20170283267A1
SERIAL NO

15513593

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Abstract

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[Problem] To provide a novel production method for pentachlorodisilane and to obtain pentachlorodisilane having a purity of 90 mass % or more by carrying out this production method.

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Patent Owner(s)

Patent OwnerAddress
DENKA COMPANY LIMITEDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Girard, Jean-Marc Tokyo, JP 121 3273
Kozuka, Takahiro Itoigawa, JP 10 24
Terasaki, Seiichi Itoigawa, JP 1 1
Yashima, Hiroyuki Itoigawa, JP 12 75

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