IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE
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United States of America Patent
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Issued Date -
Sep 28, 2017
app pub date -
Jun 12, 2017
filing date -
Jun 17, 2015
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Abstract
MEMS microphones and MEMS devices. In one embodiment, the MEMS microphone includes a membrane and a layer. The membrane is coupled to a support. The layer includes a backplate and an overtravel stop. The backplate is coupled to the support. The overtravel stop is coupled to the membrane and is physically separated from the backplate by a gap in a radial direction. The overtravel stop has a first end that is oriented proximal to the membrane and a second end that is oriented distal to the membrane. The second end flares outward to restrict movement of the membrane in the radial direction by contacting the backplate.
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