Charged particle beam apparatus
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United States of America Patent
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May 19, 2020
Grant Date -
Sep 28, 2017
app pub date -
Mar 24, 2017
filing date -
Mar 25, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A charged particle beam apparatus which automatically prepares a sample piece from a sample, includes: a charged particle beam irradiation optical system configured to perform irradiation of a charged particle beam; a sample stage configured to move, the sample being placed on the sample stage; a sample piece relocation unit configured to hold and transport the sample piece which is separated and picked up from the sample; a holder fixing stage which holds a sample piece holder to which the sample piece is relocated; and a computer which performs positional control in relation to a target object based on a template and positional information which is obtained from an image of the target object, the template being generated based on an absorption current image of the target object which is acquired using the irradiation of the charged particle beam.
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