METHOD OF MEASURING AND ASSESSING A PROBE CARD WITH AN INSPECTION DEVICE

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United States of America Patent

SERIAL NO

15622246

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of assessing functionality of a probe card includes providing a probe card analyzer without a probe card interface, removably coupling a probe card having probes to a support plate of the probe card analyzer, aligning a sensor head of the probe card analyzer with the probe card, and measuring a component of the probes with the sensor head.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Olmstead, Greg Sammamish, US 4 8

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges400170425163241623181358501 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0100200300400500600700800900100011001200130014001500160017001800

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