Gas jetting apparatus for film formation apparatus
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United States of America Patent
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Jun 9, 2020
Grant Date -
Sep 28, 2017
app pub date -
Oct 29, 2014
filing date -
Oct 29, 2014
priority date (Note) -
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Abstract
The gas jetting apparatus according to the present invention includes a gas jetting cell unit for rectifying a gas and jetting the rectified gas into the film formation apparatus. The gas jetting cell unit has a fan shape internally formed with a gap serving as a gas route. A gas in a gas dispersion supply unit enters from a wider-width side of the fan shape into the gap, and, due to the fan shape, the gas is rectified, accelerated, and output from a narrower-width side of the fan shape into the film formation apparatus.
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