THERMAL-AWARE FINFET DESIGN

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United States of America Patent

SERIAL NO

15073560

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Abstract

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According to various aspects, a thermal-aware finned field-effect transistor (FinFET) may have a design that can substantially reduce hot spot temperatures and resolve other self-heating problems. More particularly, the FinFET design may use aluminum nitride (AlN) fins that can provide a main thermal exit and a source, drain, and channel formed from materials that can spread or dissipate heat, wherein AlN has a high thermal conductivity compared to silicon such that using AlN to form the fins may substantially increase heat flux to a silicon substrate relative to silicon fins. Furthermore, thermal-efficient materials may be used to form the source, drain, and channel structures to further spread heat and decrease hot spot temperatures.

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Patent Owner(s)

Patent OwnerAddress
QUALCOMM INCORPORATED5775 MOREHOUSE DRIVE SAN DIEGO CA 92121-1714

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LEE, Yong Ju San Diego, US 241 1042

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