METHOD FOR FORMING METALLIZATION STRUCTURE
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United States of America
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Issued Date -
Sep 21, 2017
app pub date -
Sep 8, 2016
filing date -
Sep 8, 2016
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Abstract
A method for forming a metallization structure is provided, including forming a metallic powder layer on a substrate; performing a first laser sintering on a first portion of the metallic powder layer to form a metal layer; and in the presence of oxygen, performing a second laser sintering on a second portion of the metallic powder layer to form a metal oxide layer to serve as a first dielectric layer.
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