METHOD FOR INSPECTING BLANKING PLATE
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United States of America Patent
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app pub date -
Feb 6, 2017
filing date -
Mar 16, 2016
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Abstract
In one embodiment, a method for inspecting a blanking plate includes generating a plurality of beams by causing a charged particle beam to pass through a shaping aperture array having a plurality of holes, performing blanking deflection on the plurality of beams by using a plurality of blankers provided in a blanking plate, each of the plurality of blankers corresponding to one of the plurality of beams, writing a first inspection pattern on a substrate by using a first writing mode in which beams that have not been deflected by the plurality of blankers are radiated onto the substrate, writing a second inspection pattern on the substrate by using a second writing mode in which beams that have been deflected by the plurality of blankers are radiated onto the substrate, obtaining a pattern image of the first inspection pattern and a pattern image of the second inspection pattern, the first and second inspection patterns having been formed on the substrate, and determining a defect by comparing the obtained pattern images.
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