Scanning probe microscope and measurement method using the same
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United States of America Patent
Stats
-
Jul 9, 2019
Grant Date -
Sep 21, 2017
app pub date -
Aug 31, 2016
filing date -
Mar 15, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A scanning probe microscope that includes a probe, a positioning unit configured to position a probe on a measurement sample, an excitation unit configured to excite the measurement sample at a predetermined frequency, a resonance unit configured to output a frequency modulation signal by converting a change of a capacitance of the measurement sample, a lock-in amplifier configured to output a differential capacitance signal obtained by extracting a predetermined frequency component and a harmonic component of the predetermined frequency of the demodulated signal, a conversion unit configured to output data indicative of a relationship between a voltage applied to the measurement sample and the capacitance, a detecting unit that detects a voltage value corresponding to a feature point of the relationship data, and a main measurement control unit that measures electrical characteristics of the measurement sample subjected to a DC bias voltage substantially equal to the feature point voltage.
First Claim
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International Classification(s)
- 2016 Application Filing Year
- G01Q Class
- 118 Applications Filed
- 104 Patents Issued To-Date
- 88.14 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01Q Class
- 0 % this patent is cited more than
- 6 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jan 9, 2027 |
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