THERMAL TYPE VACUUM GAUGE
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Sep 21, 2017
app pub date -
Mar 15, 2016
filing date -
Mar 15, 2016
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A thermal type vacuum gauge is disclosed herein and includes a first floating structure, a second floating structure, a first cavity and a second cavity. The first floating structure is formed by the first insulating layer, the second insulating layer, and the first sensing resistor. The second floating structure is formed by the second insulating layer, and the second sensing resistor. The first cavity and the second cavity are respectively formed below the first floating structure and the second floating structure. The thermal type vacuum gauge is implemented in a measurement circuit having a first resistor, a second resistor, a third resistor and a fourth resistor. The first sensing resistor and the second sensing resistor are respectively implemented to be as at least two of the first resistor, the second resistor, the third resistor and the fourth resistor of the measurement circuit.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully