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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
SERCOMM CORPORATION	8F NO 3-1 YUANQU ST NANKANG TAIPEI 115

International Classification(s)

• G06T:IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
• G06K:RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD ....

• 2017 Application Filing Year
• G06T Class
• 12413 Applications Filed
• 9020 Patents Issued To-Date
• 72.67 % Issued To-Date

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Zhao, Shao-Hai	Jiangsu Province, CN	11	48
# of filed Patents : 11 Total Citations : 48

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Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Dec 23, 2027
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Dec 23, 2031

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 23, 2020	US,10692217,B2   US10692217B2	GRANTED PATENT AS SECOND PUBLICATION
September 14, 2017	US,20170262998,A1   US20170262998A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent Application No: 2013/0065,403

WAFER CARRIER WITH THERMAL FEATURES

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Abstract

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A wafer carrier used in wafer treatments such as chemical vapor deposition has pockets for holding the wafers and support surfaces for supporting the wafers above the floors of the pockets. The carrier is provided with thermal control features such as trenches which form thermal barriers having lower thermal conductivity than surrounding portions of the carrier. These thermal control features promote a more uniform temperature distribution across the wafer surfaces and across the carrier top surface.

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Description

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