OPTICAL ASSEMBLY HAVING A THERMALLY CONDUCTIVE COMPONENT

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United States of America Patent

SERIAL NO

15604837

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Abstract

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An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m−1 K−1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m−1 K−1.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaller, Julian Koenigsbronn, DE 22 74
Sorg, Franz Aalen, DE 40 307
Weissenrieder, Karl-Stefan Elchingen, DE 10 68
Winter, Ralf Schwaebisch Gmuend, DE 11 10

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