Importance

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Abstract

Embodiments disclosed herein include thermal expansion actuators, systems using the same (e.g., microscopes), and methods of using the same. The thermal expansion actuators disclosed herein can include at least one beam coupled to and extending between a plurality of support portions. The thermal expansion actuators also include at least one heating element configured to heat at least a portion of the thermal expansion actuators, such as the at least one beam. The support portions are coupled to an structure (e.g., a component of a microscope) in a manner that at least partially restrains thermal expansion or contraction of the thermal expansion actuators in at least one direction when the thermal expansion actuators are heated or cooled, respectively. Restraining the thermal expansion actuators can controllably and selectively produce relative movement in the at least one beam (e.g., deflected). For example, the thermal expansion actuators can be heated or cooled to controllably and selectively deflect the beam in 1 μm displacements or less.

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First Claim