Electron vibrometer and determining displacement of a cantilever
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 28, 2018
Grant Date -
Sep 14, 2017
app pub date -
Mar 3, 2017
filing date -
Mar 8, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An electron vibrometer includes: an electron source providing a beam of primary electrons; a cantilever including: a receiver portion including: a gradient in thickness, a gradient in mass, atomic number of constituent atoms, or a combination thereof, the cantilever being disposed relative to the electron source such that the receiver portion of the cantilever receives the beam of primary electrons, and produces a plurality of scattered electrons from the receiver portion in response to receipt of the beam of primary electrons; and a charged particle detector that receives the plurality of scattered electrons from the receiver portion, and produces a detector signal comprising an amplitude that varies in relation to the gradient subject to receipt of the primary electrons, and the detector signal providing determination of the displacement of the cantilever.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2017 Application Filing Year
- G01N Class
- 13595 Applications Filed
- 8906 Patents Issued To-Date
- 65.51 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- G01N Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Feb 28, 2026 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Feb 28, 2030 |
