Stimulating an optical sensor using optical radiation pressure

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United States of America Patent

PATENT NO 10088498
APP PUB NO 20170261531A1
SERIAL NO

15443339

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Abstract

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A method of stimulating a MicroElectroMechanical Systems (MEMS) structure (e.g. a cantilever), and an optical sensor for use in such a method, using optical radiation pressure instead of electrostatic pressure, or the like. An optical pulse creates optical radiation pressure which stimulates movement of the MEMS structure and then movement of the MEMS structure may be measures. An interrogating light may be input after the optical pulse to measure movement of the MEMS structure. Advantageously, the same light source can be utilized to stimulate movement of the MEMS structure and to measure movement of the MEMS structure.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF WESTERN AUSTRALIA35 STIRLING HIGHWAY NEDLANDS WESTERN AUSTRALIA 6009 AUSTRALIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dell, John Sydney, AU 2 0
Faraone, Lorenzo Sydney, AU 20 324
Jeffery, Roger Sydney, AU 4 14
Keating, Adrian Sydney, AU 6 59
Martyniuk, Mariusz Sydney, AU 8 24
Putrino, Gino Sydney, AU 1 0
Silva, Dilusha Sydney, AU 6 17

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