Evaporating device and evaporating method
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United States of America Patent
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Jun 30, 2020
Grant Date -
Sep 14, 2017
app pub date -
May 25, 2017
filing date -
Dec 23, 2016
priority date (Note) -
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Abstract
Embodiments of the present disclosure disclose an evaporating device and an evaporating method. The evaporating device comprises: a Halbach magnet array and a mask setting region. A magnetization direction of at least part of the Halbach magnet array precesses clockwise or counter-clockwise, so that magnetic fields having different magnetic fields are formed at two sides of the Halbach magnet array; and the mask setting region is disposed within the magnetic field at one side of the Halbach magnet array. The mask of the ferromagnetic material is placed in the evaporating device provided by the embodiments of the present disclosure. The mask is subject to an attractive force of the Halbach magnet array.
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