SEMICONDUCTOR EPITAXIAL WAFER AND METHOD OF PRODUCING THE SAME, AND METHOD OF PRODUCING SOLID-STATE IMAGE SENSING DEVICE
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May 21, 2015
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Aug 28, 2014
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To provide a semiconductor epitaxial wafer having an epitaxial layer with excellent crystallinity, the semiconductor epitaxial wafer is a semiconductor epitaxial wafer in which an epitaxial layer is formed on a surface of a semiconductor wafer, and the peak of the hydrogen concentration profile detected by SIMS lies in a surface portion of the semiconductor wafer on the side where the on the side where the epitaxial layer is formed.
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