Metal shunt resistor
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United States of America Patent
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app pub date -
Sep 10, 2015
filing date -
Sep 9, 2014
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Abstract
In one embodiment, a shunt resistor is provided, comprising two terminals, a semiconductor substrate embodying at least one temperature sensor comprising at least a temperature sensitive element comprising at least one pn-junction, and at least two metal layers above the semiconductor substrate, at least the upper of the metal layer comprising a path that electrically connects the two terminals, whereby the temperature sensor is below and within the periphery of the upper metal layer.
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