System and method of characterizing micro-fabrication processes
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 17, 2018
Grant Date -
Sep 7, 2017
app pub date -
May 22, 2017
filing date -
Mar 15, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ONTO INNOVATION INC | 16 JONSPIN ROAD WILMINGTON MA 01887 |
International Classification(s)

- 2017 Application Filing Year
- G01N Class
- 13595 Applications Filed
- 8906 Patents Issued To-Date
- 65.51 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Dhaliwal, Jatinder | Plano, US | 4 | 1 |
# of filed Patents : 4 Total Citations : 1 | |||
Durden, Kenneth | Vadnais Heights, US | 4 | 36 |
# of filed Patents : 4 Total Citations : 36 | |||
Grant, Michael | Minneapolis, US | 53 | 816 |
# of filed Patents : 53 Total Citations : 816 | |||
Knauber, Steven | Richardson, US | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Miller, Justin | Bloomington, US | 115 | 570 |
# of filed Patents : 115 Total Citations : 570 | |||
Thornell, John | Richardson, US | 4 | 1 |
# of filed Patents : 4 Total Citations : 1 |
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Patent Citation Ranking
- 0 Citation Count
- G01N Class
- 0 % this patent is cited more than
- 7 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jan 17, 2026 |
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jan 17, 2030 |
Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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