System and method of characterizing micro-fabrication processes

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United States of America Patent

PATENT NO 10024804
APP PUB NO 20170254757A1
SERIAL NO

15601239

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Abstract

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A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

International Classification(s)

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  • 2017 Application Filing Year
  • G01N Class
  • 13595 Applications Filed
  • 8906 Patents Issued To-Date
  • 65.51 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2017201820192020202120222023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dhaliwal, Jatinder Plano, US 4 1
Durden, Kenneth Vadnais Heights, US 4 36
Grant, Michael Minneapolis, US 53 816
Knauber, Steven Richardson, US 2 0
Miller, Justin Bloomington, US 115 570
Thornell, John Richardson, US 4 1

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges28583658330822943412011104601 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +01000200030004000250500750125015001750225025002750325035003750

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