THERMAL TREATMENT DEVICE
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United States of America Patent
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May 18, 2017
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Apr 2, 2015
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Abstract
A thermal treatment device includes a heating chamber which heats an object to be treated; and a moisture removal chamber which is provided adjacent to the heating chamber to put in and out of the object to be treated toward the heating chamber, and in which a vacuum atmosphere is created in the periphery of the object to be treated.
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