Method of Efficient Coaxial Delivery of Microwaves into a Mode Stabilized Resonating Chamber for the Purpose of Deposition of Microwave Plasma CVD Polycrystalline Diamond Films
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United States of America Patent
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Sep 7, 2017
app pub date -
Feb 28, 2017
filing date -
Mar 3, 2016
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Abstract
Disclosed is a chemical vapor deposition (CVD) reactor includes a resonating cavity configured to receive microwaves. A microwave transparent window is disposed in the resonating cavity, intermediate a top and bottom of the resonating cavity, separating the resonating cavity into an upper zone and a plasma zone. The resonating cavity is configured to propagate microwaves from the upper zone through the microwave transparent window into the plasma zone. A noise cancelling antenna is disposed in a non-weight bearing manner through an opening in the microwave transparent window. Also disclosed is a method that includes (a) providing the above-described CVD reactor; (b) feeding a carbon bearing reactive gas into the plasma zone; and (c) concurrent with step (b), feeding microwaves into the resonant cavity thereby forming in the plasma zone a plasma that causes a diamond film to form in the plasma zone.
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