COMPOSITION FOR FORMING RESIN THIN FILM FOR HYDROFLUORIC ACID ETCHING AND RESIN THIN FILM FOR HYDROFLUORIC ACID ETCHING

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United States of America Patent

SERIAL NO

15329928

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Abstract

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The invention provides a resin-thin-film-forming composition employed in hydrofluoric acid etching, which composition contains a hydrogenated polybutadiene compound having a (meth)acrylic group and a radical polymerization initiator.

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Patent Owner(s)

Patent OwnerAddress
NISSAN CHEMICAL INDUSTRIES LTDTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
SATO, Tetsuo Funabashi-shi, Chiba, JP 95 662

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