PHOTOACID-GENERATING MONOMER, POLYMER DERIVED THEREFROM, PHOTORESIST COMPOSITION INCLUDING THE POLYMER, AND METHOD OF FORMING A PHOTORESIST RELIEF IMAGE USING THE PHOTORESIST COMPOSITION

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United States of America Patent

APP PUB NO 20170248844A1
SERIAL NO

15131135

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A monomer has the structure

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aqad, Emad Northborough, US 70 229
Cameron, James F Brookline, US 111 1077
Thackeray, James W Braintree, US 102 1785

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