PRESSURE SENSOR STATE DETECTION METHOD AND SYSTEM

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United States of America Patent

APP PUB NO 20170248487A1
SERIAL NO

15435600

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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To enable early detection of abnormal states including accumulation on a pressure sensor, a characteristic measuring portion obtains a change in an output of a pressure sensor in a state in which the temperature of a sensor chip is changed by operation of a temperature controlling portion and thereby obtains a sensor characteristic indicating the change in the output. A state determination portion determines an abnormal state of a diaphragm by comparing the sensor characteristic obtained by the characteristic measuring portion with a reference characteristic, used as a reference, stored in a reference value storing portion.

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Patent Owner(s)

Patent OwnerAddress
AZBIL CORPORATION2-7-3 MARUNOUCHI CHIYODA-KU TOKYO 100-6419

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ISHIHARA, Takuya Tokyo, JP 44 155
SEKINE, Masashi Tokyo, JP 19 122
SOEDA, Masaru Tokyo, JP 12 80
TOCHIGI, Hidenobu Tokyo, JP 13 67

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