TITANIUM-SAPPHIRE LASER APPARATUS, LASER APPARATUS USED FOR EXPOSURE APPARATUS, AND TITANIUM-SAPPHIRE AMPLIFIER
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United States of America Patent
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May 9, 2017
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Dec 26, 2014
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A titanium-sapphire laser apparatus may include a continuous wave oscillation laser unit, an amplification oscillator, a pulsed laser unit, an error detector, an error controller, and an optical path length corrector. The amplification oscillator may include an optical resonator and a titanium-sapphire crystal that is provided in an optical path in the optical resonator. The error detector may be provided in an optical path of leak light of seed light from the optical resonator, and may detect an optical path length error between an optical path length in the optical resonator and a positive integer multiple of a wavelength of the seed light and output an optical path length error signal. The optical path length corrector may vary the optical path length in the optical resonator on a basis of a signal resulting from adding a correction value to the optical path error signal.
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