MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Jul 14, 2016
filing date -
Feb 18, 2016
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A micro electro mechanical systems (MEMS) device includes a first electrode formed on a substrate, a second electrode that faces the first electrode, a protective film formed on the substrate with a space therebetween in which the first and second electrodes are located, and a sealing layer covering the protective film. The second electrode has a curved structure extending in a direction away from the first electrode, and is movable toward or away from the first electrode. The protective film has a plurality of openings formed therein and a protrusion that protrudes toward the second electrode.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully