MOUNTING SHEET, POLISHING APPARATUS, AND METHOD FOR MAKING THE SAME
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United States of America Patent
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Apr 14, 2017
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Oct 3, 2012
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Abstract
The present invention relates to a mounting sheet comprising a mounting layer. The mounting layer comprises a mounting surface for mounting the substrate. The mounting surface comprises a first mounting area and a second mounting area, and wherein a mounting force of the first mounting area is stronger than a mounting force of the second mounting area. The sheet according to the invention has the different mounting areas, so that the substrate is easily unloaded when polishing is completed. Furthermore, the broken of the substrate due to removal and the duration and the difficulty of removal are reduced.
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