INTEGRATED SELF-TEST FOR ELECTRO-MECHANICAL CAPACITIVE SENSORS
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Feb 24, 2015
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Mar 14, 2014
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Abstract
A self-testing electro-mechanical capacitive sensor system. The system includes an electro-mechanical capacitive sensor and a controller. The controller is configured to receive a signal to activate a test mode, and upon receiving the signal to activate the test mode: (a) apply a bias voltage step to the electro-mechanical capacitive sensor, (b) measure a corresponding deflection of a membrane of the electro-mechanical capacitive sensor for the bias voltage as a function of time, and repeat steps (a) and (b) for a plurality of magnitudes of the bias voltage to determine at least one performance parameter of the electro-mechanical capacitive sensor.
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