MICROFABRICATED OPTICAL APPARATUS
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United States of America Patent
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Aug 17, 2017
app pub date -
Sep 22, 2016
filing date -
Nov 5, 2014
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Abstract
A microfabricated optical apparatus that includes a light source driven by a waveform, a turning mirror, and a beam shaping element, wherein the waveform is delivered to the light source by at least one through silicon via. The microfabricated optical apparatus may also include a light-sensitive receiver which generates an electrical signal in response to an optical signal. The electrical signal may be communicated to external devices by at least one additional through silicon via.
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