Method for making ferroelectric material thin films

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United States of America Patent

PATENT NO 10749056
APP PUB NO 20170236955A1
SERIAL NO

15430135

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Abstract

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A method of growing a FE material thin film using physical vapor deposition by pulsed laser deposition or RF sputtering is disclosed. The method involves creating a target to be used for the pulsed laser deposition in order to create a KBNNO thin film. The resultant KBNNO thin film is able to be used in photovoltaic cells.

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Patent OwnerAddress
THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA3600 CIVIC CENTER BOULEVARD 9TH FLOOR PHILADELPHIA PA 19104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akbasheu, Andrei R Mountain View, US 2 1
Davies, Peter K Newtown, US 6 111
Grinberg, Ilya Fairlawn, US 6 49
Rappe, Andrew M Penn Valley, US 7 50
Spanier, Jonathan E Bala Cynwyd, US 23 211
Wu, Liyan Philadelphia, US 5 5

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