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United States of America Patent
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Jul 12, 2022
Grant Date -
Aug 17, 2017
app pub date -
Oct 9, 2015
filing date -
Oct 14, 2014
priority date (Note) -
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Abstract
An inspection device of the present invention includes: THz wave irradiation unit for irradiating a specimen with THz waves; a THz wave sensing unit for detecting transmitted waves or reflected waves of the THz waves emitted to the specimen; and an information processing unit for acquiring intensity distribution of the transmitted waves of the reflected waves of the specimen from the intensity data of the transmitted waves or the reflected waves of the specimen irradiated with the THz waves, wherein the information processing unit acquires 2-dimensional intensity distribution of the transmitted waves or reflected waves, and detects whether a foreign matter is adhering to the specimen by comparing the intensity distribution obtained when the specimen without attachment of the foreign matter is detected and the intensity distribution obtained when the specimen is detected at the time of inspection. The specimen is a sheet of paper, for example.
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