Ga2O3-BASED SINGLE CRYSTAL SUBSTRATE
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Aug 6, 2015
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Aug 7, 2014
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Provided is a Ga2O3-based single crystal substrate capable of achieving a high processing yield. A Ga2O3-based single crystal substrate having a crack density of less than 0.05 cracks/cm can be obtained that has as a principal surface thereof a surface rotated 10-150° from the (100) plane, when a rotation direction from the (100) plane to the (001) plane via the (101) plane is defined as positive, having the [010] axis as the rotation axis.
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