DATA MANAGEMENT APPARATUS AND MONITORING METHOD OF SAME
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United States of America Patent
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Aug 10, 2017
app pub date -
Aug 26, 2016
filing date -
Feb 10, 2016
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Abstract
A data management apparatus according to an embodiment of the present invention includes a data analyzing unit that processes operation data transferred from a data collecting unit that collects the operation data of a semiconductor manufacturing apparatus, and a state monitoring unit that monitors a state of the data analyzing unit based on monitoring time. The monitoring time is the sum of first time that is time required for transferring the operation data to the data analyzing unit and second time that is time required for processing the operation data in the data analyzing unit.
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