Method of detecting whether microelectromechanical system device is hermetic
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United States of America Patent
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Mar 13, 2018
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app pub date -
Apr 8, 2016
filing date -
Feb 4, 2016
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Abstract
A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.
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