Dynamic determination of metal film thickness from sheet resistance and TCR value

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United States of America Patent

PATENT NO 10663279
APP PUB NO 20170227348A1
SERIAL NO

15441805

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Abstract

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Metal film thickness can be determined using the sheet resistance, resistivity, and temperature coefficient of resistivity for the metal film. Variation in film thickness measurements caused by resistivity can be reduced or eliminated. A probe head may be used for some of the measurements of the metal film. The probe head can include a temperature sensor used during sheet resistance measurements. A wafer on a chuck is heated, such as using the chuck or the probe head, for the measurements.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Juli Zhubei, TW 2 0
Cui, Jianli Shanghai, CN 5 9
Johnson, Walter Rocklin, US 13 332
Li, Huanglin Shanghai, CN 2 0
Liu, Liming Shanghai, CN 58 198
Liu, Xianghua Shanghai, CN 31 174
Yu, Lu Shanghai, CN 150 605
Zhu, Nanchang Shanghai, CN 12 25

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